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The University of Tokyo

Facilities

Terahertz microscopes

Passive THz near-field microscope (1st SNOM)
Our first passive SNOM developed in 2009, consisting of a highly sensitive detector named CSIP (Charge Sensitive Infrared Phototransistor), a carefully designed confocal system, and a home-made AFM

dewer Janis corp. Liquid He cryostat
detector CSIP
probe tip W
wavelength 14.5 μm
resolution
(far-field)
15 μm
resolution
(near-field)
20 nm
scan speed 300 ms/step






 
Passive THz near-field microscope (2nd SNOM)
A solid immersion lens (SIL) is used on the CSIP to improve SNR.

dewer QMC, Liquid He cryostat
detector CSIP
probe tip W

Passive THz near-field microscope (3rd SNOM)
Developed under JST Sentan project (2012.10 - 2016.3 )with Tokyo Instruments, INC. A mechanical cooler is used to avoid LHe transfer and a Cassegrain reflecter is used for an objective to reduce background radiation.

dewer Sumitomo Heavy Industries,
Pulse-tube type cryocooler
detector CSIP
probe tip W
wavelength 11, 14.5 μm 
resolution
(far-field)
25 μm
resolution
(near-field)
20 nm
scan speed 100 ms/step
 
Low-temperature THz near-field microscope (4th SNOM)
Specimen, optics, and the CSIP are all installed inside a low-temperature chamber (4.2 K). Now developping under JST Industry-Academia Collaborative R&D Program(2015.10 -).

dewer Unisoku, Liquid He chamber
detector CSIP
probe tip W, PtIr
wavelength 14.5 μm 
resolution
(far-field)
under construction
resolution
(near-field)
under construction
scan speed under construction
 

Home-made evaluation equipments

Tensile tester
Suppressing distortion perpendicular to tensile direction.

machining machine shop, IIS 
Max. force 5 kN
Scan speed 1 - 10 mm/s
displacement allowance > 10 mm

Measurement equipments

Optical microscope
type Olympus, BX-51
illumination epi-illumination, transmission
resolution - 500 nm
remarks differential interferometry available

Surface roughness tester
type Kosaka Laboratory,
Surfcorder SE-300
meas. range Z:800 μm
resolution Z:0.0064 μm
max. length 25 mm

Atomic force microscope (AFM)
type Thermomicroscopes, Autoprobe
meas. mode Contact/Non-Contact
resolution - 30 nm
remarks STM mode available


Monochrometer

type JASCO(Bunko-keiki) CT-25C
wavelength 0.2 μm - 50 μm
resolution 0.04 nm
accuracy 0.1 nm
 
Fourier Transform Infrared Spectroscopy (FT-IR)
type JASCO FT/IR 6600
wavenumber 7800 ~ 350 cm-1
resolution 0.4 cm-1
method transmission, reflection, ATR

Pyro-detector
type CDP Corp. PD-1
meas. frequency 0.02 - 3 THz
mod. frequency 5-30 Hz
response speed 25 ms

Thermography

type Nippon Avionics, TVS-8500
frame rate 1/120 s
wavelength 3.5-4.1 μm, 4.5-5.1 μm 
resolution 10 μm 
T-resolution 0.025 K
 

Light sources

High power laser
type Omicron, BrixX 750-1500 HP
oscillation CW/multi-mode
wavelength 750 nm
power 1500 mW

GHz source
type Terasence, Sub-THz emitter
frequency -100 GHz

 

Processing equipments

CNC milling machine
company Original Mind
type KitMill AST200
stroke X:215mm
Y:119mm
Z:103mm
resolution 1.25 μm

 Precision cutter
type Matsushita Kogyo,
LABO CUTTER
rotation 2.5 - 200 rpm
grinder size outside:150mm, inside:25.4mm


 Polishing machine
type Maruto, ML-110NT
rotation 20 - 400 rpm
sample size 10 - 100 mm