The University of Tokyo

Terahertz microscopes

Passive THz near-field microscope (1st SNOM) Our first passive SNOM developed in 2009, consisting of a highly sensitive detector named CSIP (Charge Sensitive Infrared Phototransistor), a carefully designed confocal system, and a home-made AFM dewer Janis corp.　Liquid He cryostat detector CSIP probe tip W wavelength 14.5 μm resolution (far-field) 15 μm resolution (near-field) 20 nm scan speed 300 ms/step
Passive THz near-field microscope (2nd SNOM) A solid immersion lens (SIL) is used on the CSIP to improve SNR. dewer QMC,　Liquid He cryostat detector CSIP probe tip W
Passive THz near-field microscope (3rd SNOM) Developed under JST Sentan project (2012.10 - 2016.3 )with Tokyo Instruments, INC. A mechanical cooler is used to avoid LHe transfer and a Cassegrain reflecter is used for an objective to reduce background radiation. dewer Sumitomo Heavy Industries, Pulse-tube type cryocooler detector CSIP probe tip W wavelength 11, 14.5 μm  resolution (far-field) 25 μm resolution (near-field) 20 nm scan speed 100 ms/step
Low-temperature THz near-field microscope (4th SNOM) Specimen, optics, and the CSIP are all installed inside a low-temperature chamber (4.2 K). Now developping under JST Industry-Academia Collaborative R&D Program(2015.10 -)． dewer Unisoku, Liquid He chamber detector CSIP probe tip W, PtIr wavelength 14.5 μm  resolution (far-field) under construction resolution (near-field) under construction scan speed under construction

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Home-made evaluation equipments

Tensile tester Suppressing distortion perpendicular to tensile direction. machining machine shop, IIS　 Max. force 5 kN Scan speed 1 - 10 mm/s displacement allowance > 10 mm

Measurement equipments

Optical microscope type Olympus, BX-51 illumination epi-illumination, transmission resolution - 500 nm remarks differential interferometry available
Surface roughness tester type Kosaka Laboratory, Surfcorder SE-300 meas. range Z：800 μm resolution Z：0.0064 μm max. length 25 mm
Atomic force microscope (AFM) type Thermomicroscopes, Autoprobe meas. mode Contact/Non-Contact resolution - 30 nm remarks STM mode available
Monochrometer type JASCO(Bunko-keiki)　CT-25C wavelength 0.2 μm - 50 μm resolution 0.04 nm accuracy 0.1 nm
Fourier Transform Infrared Spectroscopy (FT-IR) type JASCO　FT/IR 6600 wavenumber 7800 ～ 350 cm-1 resolution 0.4 cm-1 method transmission, reflection, ATR
Pyro-detector type CDP Corp. PD-1 meas. frequency 0.02 - 3 THz mod. frequency 5－30 Hz response speed 25 ms
Thermography type Nippon Avionics, TVS-8500 frame rate 1/120 s wavelength 3.5-4.1 μm, 4.5-5.1 μm  resolution 10 μm  T-resolution 0.025 K

Light sources

High power laser type Omicron, BrixX 750-1500 HP oscillation CW/multi-mode wavelength 750 nm power 1500 mW
GHz source type Terasence, Sub-THz emitter frequency -100 GHz

Processing equipments

CNC milling machine company Original Mind type KitMill AST200 stroke X:215mm Y:119mm Z:103mm resolution 1.25 μm
Precision cutter type Matsushita Kogyo, LABO CUTTER rotation 2.5 - 200 rpm grinder size outside:150mm, inside:25.4mm
Polishing machine type Maruto, ML-110NT rotation 20 - 400 rpm sample size 10 - 100 mm

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